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“Background Silicon as anode material for Li ion batteries has a theoretical capacity of 4,200 mAh/g, more than ten times the capacity of standard graphite anodes. Microstructured Si in wire-shape overcomes problems caused by its four-fold volume expansion during its lithiation, allowing capacity stability over hundreds of cycles [1, 2]. Arrays of Si wires have been intensively studied in the latest years as alternative anodes for Li ion batteries. Those arrays have been prepared by three major techniques: (1) Vapor-liquid-solid (VLS) technique, using mostly ‘Au droplets’ as catalytic growth sites [1, 3, 4]. (2) Metal-assisted chemical etching of single-crystalline silicon [5, 6].